Plasma Polymerized Styrene for Gate Insulator Application to Pentacene-capacitor
نویسندگان
چکیده
منابع مشابه
Flexible metal-insulator-metal capacitor using plasma enhanced binary hafnium-zirconium-oxide as gate dielectric layer
0026-2714/$ see front matter 2010 Elsevier Ltd. A doi:10.1016/j.microrel.2010.01.046 * Corresponding author. Tel.: +886 35712121x5580 E-mail address: [email protected] (F.-H. Ko). We have used a sol–gel spin-coating process to fabricate a new metal–insulator–metal capacitor comprising 10-nm thick binary hafnium–zirconium–oxide (HfxZr1 xO2) film on a flexible polyimide (PI) substrate. The su...
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We demonstrate a new flexible metal–insulator–metal capacitor using 9.5-nm-thick ZrO2 film on a plastic polyimide substrate based on a simple and low-cost sol–gel precursor spin-coating process. The surface morphology of the ZrO2 film was investigated using scan electron microscope and atomic force microscope. The as-deposited ZrO2 film under suitable treatment of oxygen (O2) plasma and then su...
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ژورنال
عنوان ژورنال: Journal of the Korean Vacuum Society
سال: 2011
ISSN: 1225-8822
DOI: 10.5757/jkvs.2011.20.5.327